| 摘要 |
[Problem] To provide a diamond substrate and a manufacturing method whereby cracking in the diamond substrate can be prevented by releasing stress during crystal growth, and the curvature radius of a crystal face inside the diamond substrate can be reduced to more than 0 km-1 and no more than 1500 km-1. [Solution] In the present invention, the curvature radius of an internal crystal face of a diamond substrate is set to more than 0 km-1 and no more than 1500 km-1 by preparing a base substrate, forming a plurality of columnar diamonds comprising diamond single crystals on one side of the base substrate, growing a diamond single crystal from the distal end of each of the columnar diamonds, coalescing the diamond single crystals grown from the distal ends of the columnar diamonds and forming a diamond substrate layer, separating the diamond substrate layer from the base substrate, and manufacturing a diamond substrate from the diamond substrate layer. |
