BALL SCREW SHOWERHEAD MODULE ADJUSTER ASSEMBLY FOR SHOWERHEAD MODULE OF SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

摘要

A semiconductor substrate processing apparatus comprises a ball screw showerhead module adjuster assembly for adjusting the planarization of a showerhead module of the apparatus. The ball screw showerhead module adjuster assembly comprises a collar supported in a stepped opening of a top plate; a bellows forms an airtight seal between the collar and an adjuster plate supported above the collar by at least three adjustable ball screws operable to adjust the planarization of the adjuster plate with respect to the collar. An insulating sleeve extends through an opening in the collar, the bellows, and the adjuster plate. A stem of the showerhead module is supported in an opening of the insulating sleeve by a nut assembly such that the stem is supported and aligned within the insulating sleeve so that an adjustment of planarization of the adjuster plate thereby adjusts the planarization of the faceplate of the showerhead module.

主权项

1. A semiconductor substrate processing apparatus for processing semiconductor substrates comprising:
a chemical isolation chamber in which individual semiconductor substrates are processed wherein a top plate forms an upper wall of the chemical isolation chamber; a process gas source in fluid communication with the chemical isolation chamber for supplying a process gas into the chemical isolation chamber; a showerhead module which delivers the process gas from the process gas source to a processing zone of the processing apparatus wherein the individual semiconductor substrates are processed wherein the showerhead module comprises a base attached to a lower end of a stem wherein a faceplate having gas passages therethrough forms a lower surface of the base, a substrate pedestal module which is configured to support the semiconductor substrate in the processing zone below the faceplate during processing of the substrate; and a ball screw showerhead module adjuster assembly which supports the showerhead module in the top plate wherein the ball screw showerhead module adjuster assembly is operable to adjust the planarization of the faceplate of the showerhead module with respect to an upper surface of the substrate pedestal module adjacent the faceplate, the ball screw showerhead module adjuster assembly comprising: a collar supported in a stepped opening of the top plate wherein an O-ring forms an airtight seal between a lower surface of the collar and a horizontal upper surface of the stepped opening; a bellows which forms an airtight seal between the collar and an adjuster plate supported above the collar by at least three adjustable ball screws wherein the at least three adjustable ball screws are operable to adjust the planarization of the adjuster plate with respect to the collar; and an insulating sleeve which extends through an opening in the collar, the bellows, and the adjuster plate, wherein a flange on an upper end of the insulating sleeve is fixedly supported on an upper surface of the adjuster plate and an O-ring forms an airtight seal therebetween; wherein the stem of the showerhead module is supported in a stepped opening of the insulating sleeve by a nut assembly, the nut assembly operable to compress a tapered/conical shoulder of the stem below the nut assembly against a conical shoulder of the insulating sleeve such that the stem of the showerhead module is fixedly supported and aligned within the insulating sleeve so that an adjustment of planarization of the adjuster plate thereby adjusts the planarization of the faceplate of the showerhead module.