| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS element which suppresses the generation of gas from an inner wall in a space in which a MEMS part is positioned. ! SOLUTION: A MEMS element includes a MEMS part 15 positioned in a space 61 covered by silicon nitride films 14, 36 and a silicon film 18. The MEMS part is arranged on the silicon nitride film. The silicon film is arranged above the MEMS part and adhered on the silicon nitride film positioned around the MEMS part. The silicon film has first and second ring-shaped holes 18a, 18b. The silicon film positioned inside the first and second ring-shaped holes is electrically connected to the MEMS part. The first and second ring-shaped holes are each filled with the silicon nitride film. ! COPYRIGHT: (C)2015,JPO&INPIT |
