发明名称 RARE EARTH FLUORIDE SPRAY POWDER AND RARE EARTH FLUORIDE-SPRAYED ARTICLE
摘要 A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma.
申请公布号 US2015225832(A1) 申请公布日期 2015.08.13
申请号 US201514691187 申请日期 2015.04.20
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 Hamaya Noriaki;Maeda Takao;Takai Yasushi
分类号 C23C4/04 主分类号 C23C4/04
代理机构 代理人
主权项 1. A rare earth element fluoride sprayed article comprising a substrate and a sprayed coating which is deposited on the substrate by plasma spraying a spray powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10 to 100 μm, a bulk density of 0.8 to 1.5 g/cm3, and a carbon content of 0.1 to 0.5% by weight, the sprayed coating having a carbon content of 0.03 to 0.1% by weight and an oxygen content of 0.3 to 0.8% by weight.
地址 Tokyo JP