发明名称 |
RARE EARTH FLUORIDE SPRAY POWDER AND RARE EARTH FLUORIDE-SPRAYED ARTICLE |
摘要 |
A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma. |
申请公布号 |
US2015225832(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
US201514691187 |
申请日期 |
2015.04.20 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
Hamaya Noriaki;Maeda Takao;Takai Yasushi |
分类号 |
C23C4/04 |
主分类号 |
C23C4/04 |
代理机构 |
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代理人 |
|
主权项 |
1. A rare earth element fluoride sprayed article comprising a substrate and a sprayed coating which is deposited on the substrate by plasma spraying a spray powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10 to 100 μm, a bulk density of 0.8 to 1.5 g/cm3, and a carbon content of 0.1 to 0.5% by weight,
the sprayed coating having a carbon content of 0.03 to 0.1% by weight and an oxygen content of 0.3 to 0.8% by weight. |
地址 |
Tokyo JP |