| 发明名称 |
SUPPORT FOR MEMS COVER |
| 摘要 |
Embodiments related to a MEMS device in which a support structure for supporting a cover is formed in a cavity are described and depicted. |
| 申请公布号 |
US2015225230(A1) |
申请公布日期 |
2015.08.13 |
| 申请号 |
US201414175970 |
申请日期 |
2014.02.07 |
| 申请人 |
Infineon Technologies Dresden GmbH |
发明人 |
SANTA Thomas |
| 分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a MEMS structure arranged within a sealed cavity; a support structure arranged within the cavity, the support structure being laterally elongated and extending in a vertical direction from a bottom of the cavity to a top of the cavity. |
| 地址 |
Dresden DE |
