MOLECULAR PRECURSOR COMPOUNDS FOR INDIUM GALLIUM ZINC OXIDE MATERIALS

摘要

Molecular precursor compounds, compositions, inks and processes for making IGZO materials. Inks made from molecular precursor compounds having the empirical formula InbGacZn(OROR)3(b+C)+2 can be printed or deposited on a substrate. The printed or deposited film can be treated to convert the molecular precursor compounds to an IGZO material.