| 摘要 |
At an area corresponding to a pressure chamber, the width of a lower electrode film in a nozzle row direction is narrower than the width of the pressure chamber in the same direction. A vibrating plate at the area corresponding to a pressure chamber includes an area P1, an area P2, and an area P3. The area P1 is an area on which the piezoelectric layer to be an activation portion is stacked. The area P2 is an area on which the piezoelectric layer to be an inactivation portion is stacked. The area P3 is an area on which the piezoelectric layer is not stacked. When the thicknesses of the vibrating plate at the areas P1, P2 and P3 are set to, respectively, t1, t2, and t3, the following expression is satisfied:;t1>t2≧t3 (1). |
| 主权项 |
1. A liquid ejecting head comprising:
a pressure chamber formation substrate in which a plurality of spaces is formed in a first direction, wherein each space that communicates with a nozzle is a pressure chamber; and a piezoelectric element obtained by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in order from a vibrating plate side on a vibrating plate that blocks an opening of the space in the pressure chamber formation substrate to sub-divide the pressure chamber, wherein the first electrode layer is provided independently for each pressure chamber and the second electrode layer is provided continuously for the plurality of the pressure chambers, the first electrode layer is formed to have a width in the first direction narrower than a width of the pressure chamber in the first direction at an area corresponding to the pressure chamber, the vibrating plate at the area corresponding to the pressure chamber includes an area P1, an area P2, and an area P3, the area P1 on which the piezoelectric layer to be an activation portion is stacked, the activation portion and the vibrating plate between which the first electrode layer is interposed, the area P2 on which the piezoelectric layer to be an inactivation portion is stacked, the inactivation portion and the vibrating plate between which the first electrode layer is not interposed, and the area P3 on which the piezoelectric layer is not stacked, and when the thickness of the vibrating plate at the area P1 is set to t1, the thickness of the vibrating plate at the area P2 is set to t2, and the thickness of the vibrating plate at the area P3 is set to t3, the following expression is satisfied,
t1>t2≧t3. |
