发明名称 |
DRIVE CIRCUIT FOR A MEMS RESONATOR |
摘要 |
A drive loop circuit for a MEMS resonator. The circuit comprises a closed loop circuit to detect and amplify a signal of the MEMS resonator, a phase shifting circuit to phase shift the detected and amplified signal, and a feedback circuit to feed the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator. The phase shifting circuit can include a low pass filter of at least 2nd order. |
申请公布号 |
US2015226556(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
US201514618006 |
申请日期 |
2015.02.10 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
AALTONEN Lasse |
分类号 |
G01C19/5712 |
主分类号 |
G01C19/5712 |
代理机构 |
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代理人 |
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主权项 |
1. A drive circuit for a MEMS resonator, said drive circuit comprising;
a drive loop circuit configured to detect and amplify a signal; a phase shifting circuit configured to phase shift the detected and amplified signal; and a feedback circuit configured to feed the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator, wherein the phase shift circuit comprises a low pass filter of at least 2nd order. |
地址 |
Nagaokakyo-shi JP |