发明名称 DRIVE CIRCUIT FOR A MEMS RESONATOR
摘要 A drive loop circuit for a MEMS resonator. The circuit comprises a closed loop circuit to detect and amplify a signal of the MEMS resonator, a phase shifting circuit to phase shift the detected and amplified signal, and a feedback circuit to feed the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator. The phase shifting circuit can include a low pass filter of at least 2nd order.
申请公布号 US2015226556(A1) 申请公布日期 2015.08.13
申请号 US201514618006 申请日期 2015.02.10
申请人 MURATA MANUFACTURING CO., LTD. 发明人 AALTONEN Lasse
分类号 G01C19/5712 主分类号 G01C19/5712
代理机构 代理人
主权项 1. A drive circuit for a MEMS resonator, said drive circuit comprising; a drive loop circuit configured to detect and amplify a signal; a phase shifting circuit configured to phase shift the detected and amplified signal; and a feedback circuit configured to feed the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator, wherein the phase shift circuit comprises a low pass filter of at least 2nd order.
地址 Nagaokakyo-shi JP
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