GAS LASER OSCILLATION DEVICE

摘要

This gas laser oscillation device has a discharge part, a blower part, and a laser gas path. The discharge part excites a laser gas medium, and the blower part blows a laser gas. The laser gas path forms a laser gas circulation path between the discharge part and the blower part. The blower part has an impeller part, a drive part, and an intermediate chamber that is provided between the impeller part and the drive part. Rotor blades which are rotated by the drive part via a rotating shaft are disposed in the impeller part. The intermediate chamber is partially partitioned by a gas shielding member into a main space and a gas damper space.