发明名称 基板処理装置
摘要 <p>Disclosed is a substrate processing device provided with: a transfer unit that transfers a strip-shaped sheet substrate in a first direction; a plurality of processing units that process a plurality of sections that segment the sheet substrate in a second direction, which intersects the first direction; and stage devices, one for each processing unit, that support the sheet substrate.</p>
申请公布号 JP5761034(B2) 申请公布日期 2015.08.12
申请号 JP20110553890 申请日期 2011.02.10
申请人 发明人
分类号 G03F9/00;G03F7/20;H01L21/027;H01L21/677 主分类号 G03F9/00
代理机构 代理人
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