摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device and method for producing a mixed gas which is capable of reducing a running cost required for mixed gas production. <P>SOLUTION: The device 1 for producing mixed gas producing the mixed gas by mixing an added gas and a principal component gas with a preset mixing ratio includes: a pressure adjusting valve 2 for adjusting pressure of the principal component gas before mixing with the added gas; and a pressure control means for controlling the pressure adjusting valve 2 so that the difference between the pressure of the added gas and the pressure of the principal component gas is more than the pressure difference according to the preset mixing ratio, according to the pressure of the added gas before mixing with the principal component gas detected by a pressure detector 16 for the added gas and the pressure of the principal component of the gas before mixing with the added gas detected by a pressure detector 18 for the principal component gas. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |