发明名称 DEPORATION APPARATUS
摘要 <p>According to an embodiment of the present invention, a deposition apparatus includes: a main body part; an accepting part provided inside the main body part to accept raw materials; a heating part for covering the main body part; and one or more grinding parts provided inside the main body part.</p>
申请公布号 KR20150091624(A) 申请公布日期 2015.08.12
申请号 KR20140012071 申请日期 2014.02.03
申请人 LG INNOTEK CO., LTD. 发明人 KIM, CHANG WOO;MOK, JIN IL;MOON, BONG SEOK;HAN, SEUNG HEON
分类号 H01L31/18;H01L31/04 主分类号 H01L31/18
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