发明名称 ビアホールの製造方法およびビアホールを有する半導体素子の製造方法
摘要 <p>A first metal mask has a portion exposed at an opening of a second metal mask. The second metal mask is formed to be thicker than the first metal mask. The thickness of the first and second metal masks is such that the etching at an opening of the first mask reaches a source electrode when the etching at the opening of the second mask substantially reaches a semiconductor device forming layer.</p>
申请公布号 JP5760394(B2) 申请公布日期 2015.08.12
申请号 JP20100248451 申请日期 2010.11.05
申请人 发明人
分类号 H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/3205
代理机构 代理人
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