| 摘要 |
<p>A method for managing a tip of a probe card includes the steps of: emitting a light to the tip of the probe card; acquiring a tip image by photographing the tip receiving the light at the front in a light intensity method; measuring the size of a bright part corresponding to an end of the tip by checking the acquired tip image; comparing the measured size with a reference size; and replacing the probe card including the tip in case the measured size exceeds the reference size, according to the comparison result. The objective of the present invention is to provide a method for managing the tip efficiently by measuring wear condition of the tip of the probe card precisely.</p> |
