| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for introducing gas with known minute flow rate in a vacuum container. <P>SOLUTION: A device is constituted of: a micropore filter; a gas reservoir; a gas introduction system; a vacuum pump; a vacuum gauge; a valve; and pipe arrangement, and gas with known minute flow rate can be introduced in the vacuum container in almost all kinds of gas with one device by introducing the gas in a vacuum device while maintaining a condition under which flow of gas passing through the micropore filter satisfies a molecular flow condition by using the micropore filter of which the conductance of the molecular flow and the pressure to be the molecular flow are preliminarily calibrated, since relation between primary pressure and flow rate is linear, different flow rate can be easily generated, the gas with the known flow rate can be introduced even by using mixed gas, temperature dependence can be theoretically corrected, gas, such as water vapor and ethanol vapor with condensability, adsorptivity in which it is difficult to introduce the gas with the known flow rate can be also similarly introduced. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
