发明名称 |
Force detecting device, robot, eletronic component conveying apparatus |
摘要 |
A force detecting device (1) includes a first base section (2), a second base section, and a charge output element arranged between the first base section (2) and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device (1) detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction. |
申请公布号 |
EP2878939(A3) |
申请公布日期 |
2015.08.12 |
申请号 |
EP20140191445 |
申请日期 |
2014.11.03 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KAMIYA, TOSHIYUKI;KAWAI, HIROKI |
分类号 |
G01L5/16;B25J9/16;G01L5/22;G01P15/18;H01L41/047;H01L41/113 |
主分类号 |
G01L5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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