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发明名称
シリコン単結晶引上げ用シリカガラスルツボの製造方法およびその製造装置
摘要
申请公布号
JP5763027(B2)
申请公布日期
2015.08.12
申请号
JP20120210532
申请日期
2012.09.25
申请人
发明人
分类号
C03B20/00;C30B15/12;C30B29/06
主分类号
C03B20/00
代理机构
代理人
主权项
地址
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