| 摘要 |
<p>A method for manufacturing a three-dimensionally shaped comb-tooth electret electrode, provided with positive ions, includes: forming a three-dimensional movable comb-tooth electrode 21 and a three-dimensional fixed comb-tooth electrode 22 from an Si substrate 1; contacting a vapor including ions thereto, and forming an oxide layer including ions upon surfaces of the comb-tooth electrodes with heat applied thereto; and applying a voltage between the movable electrode 21 and the fixed electrode 22 with heat applied thereto, and thereby causing the ions included in the oxide layer to shift to a surface of the oxide layer; wherein, the voltage between the movable electrode 21 and the fixed electrode 22 is changed, so that the operation of each of the comb-teeth of the movable electrode 21 being alternatingly pulled in against two opposed comb-teeth of the fixed electrode 22 is repeated, and the pulling in voltage and the pulled-in state release voltage are gradually increased.</p> |
