发明名称 荷電粒子リソグラフィ装置と、真空チャンバー内の真空を生成する方法
摘要 <p>A vacuum chamber comprising a plurality of wall panels enclosing an interior space, in which the wall panels are removably attached to form the chamber using a plurality of connection members for locating the wall panels in a predetermined arrangement. The vacuum chamber further comprises one or more sealing members provided at the edges of the wall panels. The wall panels are arranged so that a vacuum tight seal is formed at the edges of the wall panels as a result of forming a vacuum in the interior space.</p>
申请公布号 JP5762981(B2) 申请公布日期 2015.08.12
申请号 JP20110550555 申请日期 2010.02.17
申请人 发明人
分类号 H01L21/027;G03F7/20;H01J37/16;H01J37/18 主分类号 H01L21/027
代理机构 代理人
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地址