发明名称 X-RAY DEVICE, METHOD, MANUFACTURING METHOD FOR STRUCTURE, PROGRAM, AND RECORDING MEDIUM ON WHICH PROGRAM IS RECORDED
摘要 Provided is an x-ray device that can suppress detection error in relation to the inside of an object that contains various kinds of materials. Also provided are a method and a manufacturing method for a structure. The x-ray device irradiates a measurement object with x-rays and detects the transmitted x-rays that were transmitted through the measurement object, and is provided with an information processing unit (100) that in accordance with the ratio between a first material and a second material contained in the measurement object generates second detection information from first detection information obtained by the above detection. The information processing unit generates the second detection information from the first detection information in accordance with the ratio between the first material and the second material and the proportion of the x-rays that are transmitted through the first material and the second material, per unit surface area of a plane orthogonal to the incidence direction of the x-rays.
申请公布号 EP2806264(A4) 申请公布日期 2015.08.12
申请号 EP20130738159 申请日期 2013.01.18
申请人 NIKON CORPORATION 发明人 AOKI, TAKASHI
分类号 G01N23/04;G01N23/087 主分类号 G01N23/04
代理机构 代理人
主权项
地址