| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact phase sift mechanism at low cost. <P>SOLUTION: A compact phase shift mechanism is provided at low cost by: (1) reflecting a trigger light beam with a mirror for phase shifting a reference light beam, (2) changing the incident angles of the reference light beam and the trigger light beam such that the trigger light beam is phase shifted several times more than the reference light beam, and (3) making a trigger signal of a camera with a light sensor for detecting an interference pattern produced by the trigger light beam; instead of using a piezo stage having a feedback control function which is well known as a conventional phase shift mechanism. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
