发明名称 METHOD FOR TRANSFERING GRAPHENE FILMS AND DEVICE USING THE SAME
摘要 Disclosed are a method to transfer graphene thin films, and a device using the same. According to an embodiment of the present invention, the method to transfer graphene thin films comprises: a first step of attaching a supporting thin film onto a graphene thin film formed on top of a substrate; a second step of removing the substrate; and a third step of manufacturing a device including the supporting thin film, on which the graphene thin film has been attached, as a functional layer.
申请公布号 KR20150092047(A) 申请公布日期 2015.08.12
申请号 KR20150100951 申请日期 2015.07.16
申请人 GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, KWANG HEE;KAHNG, YUNG HO;LEE, JONG HOON;LEE, BYOUNG HOON
分类号 H01L21/68;H01L21/205;H01L29/16;H01L51/00 主分类号 H01L21/68
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