发明名称 |
METHOD FOR TRANSFERING GRAPHENE FILMS AND DEVICE USING THE SAME |
摘要 |
Disclosed are a method to transfer graphene thin films, and a device using the same. According to an embodiment of the present invention, the method to transfer graphene thin films comprises: a first step of attaching a supporting thin film onto a graphene thin film formed on top of a substrate; a second step of removing the substrate; and a third step of manufacturing a device including the supporting thin film, on which the graphene thin film has been attached, as a functional layer. |
申请公布号 |
KR20150092047(A) |
申请公布日期 |
2015.08.12 |
申请号 |
KR20150100951 |
申请日期 |
2015.07.16 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, KWANG HEE;KAHNG, YUNG HO;LEE, JONG HOON;LEE, BYOUNG HOON |
分类号 |
H01L21/68;H01L21/205;H01L29/16;H01L51/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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