| 发明名称 |
COMPOSITIONS FOR CLEANING III-V SEMICONDUCTOR MATERIALS AND METHODS OF USING SAME |
| 摘要 |
<p>Liquid compositions useful for the cleaning of residue and contaminants from a III-V microelectronic device material, such as InGaAs, without substantially removing the III-V material. The liquid compositions are improvements of the SC1 and SC2 formulations.</p> |
| 申请公布号 |
KR20150092276(A) |
申请公布日期 |
2015.08.12 |
| 申请号 |
KR20157017848 |
申请日期 |
2013.12.04 |
| 申请人 |
ENTEGRIS, INC.;ATMI TAIWAN CO., LTD. |
发明人 |
COOPER EMANUEL I.;WU HSING CHEN;YANG MIN CHIEH;TU SHENG HUNG;CHEN LI MIN |
| 分类号 |
C11D3/00;C11D3/39;C11D7/08;C11D7/26;C11D7/32;C11D11/00 |
主分类号 |
C11D3/00 |
| 代理机构 |
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