| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad which improves a polishing efficiency while suppressing degradation of a polishing quality, and also to provide a method of easily manufacturing the polishing pad like this. <P>SOLUTION: The surface of the polishing pad at least used for polishing of a workpiece is constituted of a foam sheet made of a foamed polymer component, and air bubbles of the foam sheet are opened on the surface. The air bubbles of the foam sheet each have a vertically long shape extending in a sheet thickness direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
