| 摘要 |
<p>A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas flow pipe, a driving part, a divide wall, a main ejection apparatus, a sub ejection apparatus, a detect portion, and a clogged laying pipe judge part. The laser gas flow pipe constitutes a circulating route of the laser gas. The driving part drives the air blower for blowing the laser gas. The divide wall separates the air blower and the driving part. The main ejection apparatus has a valve, and ejects laser gas from the laser gas flow pipe. The sub ejection apparatus ejects laser gas from the driving part. The detector detects an amount of laser gas ejected from the main ejection apparatus and the sub ejection apparatus. The clogged laying pipe judge part judges that the laying pipe of the sub ejection apparatus is clogged when an amount of ejected laser gas measured at a time the valve of the main ejection apparatus is closed is lower than a predetermined value.</p> |
