| 发明名称 |
Piezoelectric actuated device, method and system |
| 摘要 |
A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density. |
| 申请公布号 |
US9105834(B2) |
申请公布日期 |
2015.08.11 |
| 申请号 |
US201213360243 |
申请日期 |
2012.01.27 |
| 申请人 |
Microvision, Inc. |
发明人 |
Davis Wyatt O.;Baran Utku;Brown Dean R.;Urey Hakan |
| 分类号 |
G02B26/08;G02B26/10;G02B26/12;H01L41/00;H02N2/00;H01L41/047;H01L41/08;H01L41/33 |
主分类号 |
G02B26/08 |
| 代理机构 |
|
代理人 |
Wills Kevin D. |
| 主权项 |
1. A piezoelectric actuated device comprising:
a frame; a platform that can take on different angular displacements relative to the frame; at least one flexure coupling the platform to the frame; and piezoelectric material mechanically coupled to at least a portion of the frame, wherein the piezoelectric material has a non-uniform area density, wherein the device exhibits a desired structural Eigenmode of vibration that results in stress on the frame, and the non-uniform area density is related to the stress. |
| 地址 |
Redmond WA US |
