Deformable mirror with capacitive sensors

摘要

The invention relates to a deformable mirror (1) comprising a deformable reflector member (2) possessing a reflecting surface (3), at least one actuator (6) suitable for driving said reflector member (2) to move substantially along a deformation direction (XX′) so as to be capable of deforming the reflecting surface (3), and at least one position sensor (14) arranged in the interstitial space (12) lying between the reflecting surface (3) and the widest cross-section (S6MAX) of the actuator (6), on an intermediate reference support (11), in such a manner as to be capable of evaluating the position of the reflecting surface (3), the sensor (14) occupying a cross-section (S14) transversely to the deformation direction that, in projection along said deformation direction (XX′), presents at least one overlap zone (SR) with the widest cross-section of the actuator (S6MAX). Such deformable mirrors are suitable for use in adaptive optics.

主权项

1. A deformable mirror (1) comprising firstly a deformable reflector member (2) that possesses a reflecting surface (3) and secondly at least one actuator (6) suitable for driving said reflector member (2) in movement substantially along a deformation direction (XX′) so as to be capable of deforming the reflecting surface (3), said mirror being characterized in that the actuator (6) presents a cross-section (S6) of variable width along said deformation direction (XX′), and in that it includes at least one interstitial position sensor (14) that is arranged in the interstitial space (12) lying between the reflecting surface (3) and the largest cross-section (S6MAX) of the actuator (6), on an intermediate reference support (11) relative to which the reflector member (2) moves when it is driven by said actuator, so as to be able to evaluate the position and/or the movement of said reflecting surface (3) relative to said reference support (11), said sensor (14) occupying a cross-section (S14) transversely to the deformation direction that, in projection along said deformation direction (XX′), presents at least one overlap zone (SR) with the largest cross-section of the actuator (S6MAX).