| 发明名称 | Method for making an imager device | ||
| 摘要 | A method for making an imager device including the implementation of the steps of: making, through a layer of electric insulating material within which are made one or more pixels each including an antenna able to pick up an electromagnetic wave received at said pixel, of an aperture forming an access to a layer of sacrificial material provided between the layer of electric insulating material and a reflective layer able to reflect said electromagnetic wave;removing part of the layer of sacrificial material through the aperture, forming between the reflective layer and the layer of electric insulating material at least one optical cavity. | ||
| 申请公布号 | US9105551(B2) | 申请公布日期 | 2015.08.11 |
| 申请号 | US201414178764 | 申请日期 | 2014.02.12 |
| 申请人 | Commissariat à l'énergie atomique et aux énergies alternatives | 发明人 | Dupre Cecilia |
| 分类号 | H01L21/00;H01L27/146;G01J5/02;G01J5/08;G01J5/20 | 主分类号 | H01L21/00 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A method for making an imager device including at least the implementation of the steps of: making, through at least one layer of electric insulating material within which are made one or more pixels each including at least one antenna able to pick up at least one electromagnetic wave received at said pixel, of at least an aperture forming an access to at least one layer of sacrificial material provided between the layer of electric insulating material and at least one reflective layer able to reflect said electromagnetic wave; removing at least part of the layer of sacrificial material through the aperture, forming between the reflective layer and the layer of electric insulating material at least one optical cavity. | ||
| 地址 | Paris FR | ||