Method of fabricating silicon carbide

摘要

A method of fabricating silicon carbide according to the embodiment comprises the steps of preparing a mixture by mixing a dry silicon source with a carbon source comprising an organic carbon compound; and reacting the mixture, wherein a viscosity of the carbon source is in a range of 20 cps to 1000 cps.

主权项

1. A method of fabricating silicon carbide, the method comprising:
preparing a mixture by mixing a dry silicon source with a carbon source comprising an organic liquid-phase carbon compound; and reacting the mixture, wherein the preparing of the mixture is achieved by spray-coating the carbon source on the dry silicon source, wherein the mixture is obtained without using a solvent, wherein a viscosity of the carbon source is in a range of about 20 cps to about 1000 cps.