| 发明名称 | In situ calibration of interferometers | ||
| 摘要 | In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations. | ||
| 申请公布号 | US9103649(B2) | 申请公布日期 | 2015.08.11 |
| 申请号 | US201213608848 | 申请日期 | 2012.09.10 |
| 申请人 | Zygo Corporation | 发明人 | Sykora Daniel M.;Kuechel Michael |
| 分类号 | G01B11/02;G01B9/02;G01B11/24 | 主分类号 | G01B11/02 |
| 代理机构 | Fish & Richardson P.C. | 代理人 | Fish & Richardson P.C. |
| 主权项 | 1. A method, comprising: making a sequence of phase measurements of a test object using an interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes; and determining information about the test object based on at least some of the phase measurements, wherein determining the information comprises reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations. | ||
| 地址 | Middlefield CT US | ||