Reel-to-reel reaction of precursor film to form solar cell absorber

摘要

A roll-to-roll rapid thermal processing (RTP) tool with multiple chambers for forming a solar cell absorber by reacting a precursor layer on a continuous flexible workpiece. The RTP tool includes an elongated housing having a heating chamber with a predetermined temperature profile, a supply chamber and a receiving chamber. The heating chamber includes a small process gap in which the precursor layer is reacted with a Group VIA material to form an absorber layer. The continuous flexible workpiece is unrolled and advanced from the supply chamber into the heating chamber, and the processed continuous flexible workpiece is taken up and rolled in the receiving chamber.

主权项

1. An integrated roll-to-roll rapid thermal processing (RTP) tool for forming a solar cell absorber by reacting a precursor layer on a surface of a continuous flexible workpiece, the tool comprising:
an elongated housing that includes a sealed common chamber, the sealed common chamber including a heating chamber, a heating element, a supply chamber, a receiving chamber and an outer enclosure around the heating chamber that forms a seal within the outer enclosure, including the sealed common chamber, wherein;
the heating chamber defines a narrow process gap that applies a predetermined temperature profile using the heating element to that portion of the continuous flexible workpiece disposed therein, the narrow process gap defined by a top wall, a bottom wall, and side walls that form an opening in which a height is substantially less than a width thereof, and wherein the heating chamber has a heating chamber input opening and a heating chamber output opening, and wherein the heating element is disposed within the outer enclosure, outside of the heating chamber and outside of the narrow process gap;the supply chamber that holds a supply roll of the continuous flexible workpiece and has a supply chamber opening, wherein the supply chamber opening aligns with the heating chamber input opening and wherein the continuous flexible workpiece is configured to be advanced into the heating chamber from the supply chamber;the receiving chamber that holds a receiving roll to collect the continuous flexible workpiece from the heating chamber and has a receiving chamber opening, wherein the receiving chamber opening aligns with the heating chamber output opening and wherein the continuous flexible workpiece is configured to be advanced into the receiving chamber from the heating chamber; anda moving mechanism to hold the continuous flexible workpiece within the common chamber and move the continuous flexible workpiece through the narrow process gap of the heating chamber by feeding previously unrolled portions of the continuous flexible workpiece from the supply roll and taking up and wrapping processed portions of the continuous flexible workpiece on the receiving roll in the receiving chamber.