| 主权项 |
1. A method for producing a semiconductor device, comprising:
forming a first trench gate structure and a second trench gate structure in a plurality of semiconductor layers including a first semiconductor layer of a first conductivity type, a second semiconductor layer of the first conductivity type on the first semiconductor layer, a third semiconductor layer of a second conductivity type on the second semiconductor layer, and a fourth semiconductor layer of the first conductivity type on the third semiconductor layer, the second semiconductor layer having a first conductivity type impurity concentration that is lower than a first conductivity type impurity concentration of the first semiconductor layer, the first and second trench gate structures extending along a first direction from a first surface of the fourth semiconductor through the third semiconductor layer and reaching the second semiconductor layer and being spaced from each other along a second direction that is parallel to the first surface and crossing the first direction; forming a contact groove passing through the fourth semiconductor layer between the first and second trench gate structures and reaching the third semiconductor layer, the contact groove having a width along the second direction, that narrows with increasing distance along the first direction into the fourth semiconductor layer; and forming a fifth semiconductor layer in the second semiconductor layer by introducing an impurity of the second conductivity type through the contact groove and the fourth semiconductor layer to a plurality of introduction positions spaced along the first direction within the second semiconductor layer, the introducing occurring in a sequence such that each introduction position in the sequence is at a distance from the first semiconductor layer that is greater than any preceding introduction position within the sequence, the fourth semiconductor layer, in which the contact groove is formed, serving as a mask during the introducing of the impurity of the second conductivity type to the plurality of introduction positions, the fifth semiconductor layer having a first portion and a second portion that is closer along the first direction to the first semiconductor layer than is the first portion, the first portion being wider along the second direction than the second portion, and a dose amount at a first introduction position in the sequence of the introducing of the impurity of the second conductivity type being higher than a dose amount at any subsequent introduction position in the sequence. |
