发明名称 |
Integrated circuit including an environmental sensor |
摘要 |
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate including at least one environmental sensor. The integrated circuit also includes a cap layer located on a major surface of the substrate. The integrated circuit further includes at least one elongate channel for allowing access of said sensor to an environment surrounding the integrated circuit. |
申请公布号 |
US9105479(B2) |
申请公布日期 |
2015.08.11 |
申请号 |
US201314018484 |
申请日期 |
2013.09.05 |
申请人 |
ams International AG |
发明人 |
Besling Willem Frederik Adrianus;Kengen Martien |
分类号 |
H01L23/04;B81B7/00;H01L23/31;H01L21/50;H01L21/77 |
主分类号 |
H01L23/04 |
代理机构 |
McDermott Will & Emery LLP |
代理人 |
McDermott Will & Emery LLP |
主权项 |
1. An integrated circuit comprising:
a semiconductor substrate including at least one environmental sensor; a cap layer located on a major surface of the substrate, and at least one elongate channel for allowing access of said sensor to an environment surrounding the integrated circuit; wherein the cap layer comprises: portions that are substantially transparent to allow light to reach an ambient light sensor located in the substrate; and portions that are substantially opaque to prevent light reaching a temperature sensor located in the substrate. |
地址 |
Rapperswil-Jona CH |