Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded

摘要

An inspection system includes a primary optical system configured to irradiate a charged particle or an electromagnetic wave as a beam, a movable unit configured to hold an inspection target and move the target through a position where the beam is irradiated, and a TDI sensor configured to integrate an amount of secondary charged particles in a predetermined direction to sequentially transfer the integrated amount. The secondary charged particles are obtained by irradiating the beam onto the target while moving the movable unit in the predetermined direction. The inspection system further includes a prevention module configured to prevent an arrival of the beam at the target side or an arrival of the secondary charged particles at the TDI sensor during a time period from one transfer to the following transfer after the elapse of a predetermined length of time from the one transfer and until the following transfer.

主权项

1. An inspection system comprising:
a primary optical system configured to irradiate either of a charged particle and an electromagnetic wave as a beam; a movable unit configured to hold an inspection target and move the inspection target through a position where the beam is irradiated by the primary optical system in a predetermined direction; a TDI sensor configured to integrate an amount of secondary charged particles in a predetermined direction through a time delay integration to sequentially transfer the integrated amount of secondary charged particles as an integrated detection amount, the secondary charged particles being obtained by irradiating the beam onto the inspection target while moving the movable unit in the predetermined direction; and a prevention module configured to prevent an arrival of the beam at the inspection target side or an arrival of the secondary charged particles at the TDI sensor during a time period from one transfer to the following transfer after the elapse of a predetermined length of time from the one transfer and until the following transfer.