Micromechanical sensor with multiple spring bars

摘要

A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).

主权项

1. A micromechanical sensor, comprising:
a substrate; an anchor coupled to the substrate; a bending spring device responsive to a rotational movement about the anchor, the bending spring device comprising spring bars that extend substantially parallel from the anchor to one or more masses, wherein each spring bar comprises: a first end being coupled to the anchor; and a second end being coupled to the one or more masses; and a meander located between the first and the second end, wherein a total length of at least one spring bar is greater than a length of bars of the meander so as to improve a linear spring characteristic of the bending spring device.