Capacitive element sensor and method for manufacturing same

摘要

The present disclosure relates to a capacitive element sensor and to a method for manufacturing same. More particularly, the present disclosure relates to a change in total capacitance brought about by the electrical charge of biomolecules attached to an electrode and to a sensor for measuring the change.

主权项

1. A capacitive element sensor comprising:
a substrate; a first electrode formed on the substrate; a second electrode formed on the substrate and separated from the first electrode; a dielectric layer formed on the first and second electrodes and the substrate; and a third electrode formed on the dielectric layer and surface-treated so that specific biomolecules can be attached thereto, wherein the first electrode and the second electrode are separated by the dielectric layer, wherein the third electrode includes a lower surface which faces upper surfaces of the first and second electrodes, and roughness is formed on the lower surface of the third electrode and the upper surfaces of the first electrode and second electrode, and wherein the first electrode, the second electrode and the third electrode function as capacitive element and change in capacitance brought about by the electrical charge of biomolecules attached to the third electrode is measured with respect to the first electrode and the second electrode.