Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus

摘要

A sensor element includes a base part 21, drive vibration arms 221 and 222, adjustment vibration arms 241-244 that vibrate in response to drive vibration of the drive vibration arms 221 and 222, detection electrodes that output a charge according to a physical quantity applied to the drive vibration arms 221 and 222, first adjustment electrodes provided on the adjustment vibration arms 241 and 242 and electrically connected to the detection electrodes for outputting a charge in response to vibration of the adjustment vibration arms 241 and 242, and second adjustment electrodes provided on the adjustment vibration arms 243 and 244 and electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the first adjustment electrodes in response to vibration of the adjustment vibration arms 243 and 244.

主权项

1. A sensor element comprising:
a base part; a drive vibration arm for vibrational drive, extending from the base part; a first vibration arm and a second vibration arm that extend from the base part and vibrate in response to vibrational drive of the drive vibration arm; a detection part including a detection electrode that outputs a signal according to a physical quantity applied to the drive vibration arm; a first electrode provided on the first vibration arm and directly electrically connected to the detection electrode for generating a charge in response to vibration of the first vibration arm; and a second electrode provided on the second vibration arm and directly electrically connected to the detection electrode for generating a charge in a reverse polarity with respect to the first electrode in response to vibration of the second vibration arm.