发明名称 密閉型AFMセル
摘要 <p>Provided is a sealed atomic force microscope (AFM) cell in which measurement accuracy does not decrease and the types of observation liquids are not limited. A sealed AFM cell (100) according to the present invention includes: a cantilever (120) including a probe; a sample holder (132) for fixing the sample; a scanner (134) for moving the sample holder (132); a lid part (122) which holds the cantilever (120) so as to position the probe near a measurement surface of the sample; and a main body part (136) which is a component for holding the scanner (134) and positioned opposite the lid part (122) with the sample in between, in which the lid part (122) and the main body part (136) are joined via a sealing liquid to seal the observation liquid inside a space formed by the lid part (122), the main body part (136), and the sealing liquid, the sealing liquid being different from the observation liquid and not in contact with the observation liquid.</p>
申请公布号 JP5761675(B2) 申请公布日期 2015.08.12
申请号 JP20130544136 申请日期 2012.11.15
申请人 发明人
分类号 G01Q30/14;G01Q60/24 主分类号 G01Q30/14
代理机构 代理人
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