| 摘要 |
<p>The present invention relates to a substrate transfer apparatus comprising: a substrate returning unit transferring a substrate; and a guide unit respectively guiding both side surfaces of the substrate transferred by the substrate returning unit. The guide unit comprises: a support bar arranged to be spaced from a transfer direction of the substrate in parallel; a roller support vertically arranged on the support bar in a line; a side roller installed to freely be rotated in the roller support, guiding a side surface of the substrate transferred by the substrate returning unit; and a buffer member absorbing and relieving a shock in case the side roller is in contact with a side surface of the substrate.</p> |
