发明名称 FIN STRUCTURE FOR A FINFET DEVICE
摘要 Provided is a fin structure for a fin field effect transistor (FinFET) device. A device comprises a substrate; a first semiconductor material arranged on the substrate; a shallow trench isolation (STI) area arranged on the substrate, and formed on facing side surfaces of the first semiconductor material; and a second semiconductor material including a first fin and a second fin arranged on the STI area, wherein the first fin is separated from the second fin by width of the first semiconductor material. The fin structure includes a first fin, an upper surface of the first semiconductor material arranged between the first fin and the second fin, and a gate layer formed on the second fin, thereby being used in generating a FinFET device.
申请公布号 KR20150091027(A) 申请公布日期 2015.08.07
申请号 KR20150101520 申请日期 2015.07.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 VELLIANITIS GEORGIOS;DAL MARK VAN;DURIEZ BLANDINE;OXLAND RICHARD KENNETH
分类号 H01L29/78;H01L29/66 主分类号 H01L29/78
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