发明名称 |
PRINTHEAD WITH NANOTIPS FOR NANOSCALE PRINTING AND MANUFACTURING |
摘要 |
A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others. |
申请公布号 |
US2015217568(A1) |
申请公布日期 |
2015.08.06 |
申请号 |
US201514689361 |
申请日期 |
2015.04.17 |
申请人 |
XEROX CORPORATION |
发明人 |
Nystrom Peter J.;Hays Andrew W.;Sahu Bijoyraj |
分类号 |
B41J2/14;H05K3/12;B41J2/16 |
主分类号 |
B41J2/14 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method for forming a nanoprinthead comprising a nanotip cantilever array including a plurality of nanotip cantilevers, the method comprising:
forming a patterned first mask comprising a first pattern over a surface of a substrate; etching a plurality of grooves within the surface of the substrate using the patterned first mask as a pattern, and removing the patterned first mask; forming a nanotip cantilever layer within the plurality of grooves and over the surface of the substrate, wherein the forming of the nanotip cantilever layer forms a plurality of nanotip cantilevers each comprising a nanotip within one of the plurality of grooves and a cantilever over the surface of the substrate, wherein the plurality of nanotip cantilevers are physically interconnected; etching the nanotip cantilever layer to separate the plurality of nanotip cantilevers that are physically interconnected into a plurality of discrete nanotip cantilevers and to form the nanotip cantilever array; attaching the nanotip cantilever array to an array of actuation devices, wherein the array of actuation devices is configured to move each nanotip in a direction toward a surface to be contacted by the nanotip, and each nanotip cantilever of the nanotip cantilever array is individually addressable; and releasing the plurality of discrete nanotip cantilevers from the substrate. |
地址 |
Norwalk CT US |