IMPRINT TEMPLATE AND METHOD FOR MANUFACTURING THE SAME

摘要

According to one embodiment, an imprint template used for imprint includes a pattern region, a peripheral region, a region, and a first transmittance control part. The pattern region is provided with a first protrusion. The peripheral region surrounds the pattern region. The region is provided in the peripheral region and provided with a second protrusion. The first transmittance control part is provided in the peripheral region and configured to control intensity of light transmitted through the template in thickness direction. The template has a planar shape axisymmetric with respect to a line passing through center of the template. The region provided with the second protrusion and the first transmittance control part are provided at positions axisymmetric to each other with respect to the line passing through the center of the template.

主权项

1. An imprint template used for imprint, comprising:
a pattern region provided with a first protrusion; a peripheral region surrounding the pattern region; a region provided in the peripheral region and provided with a second protrusion; and a first transmittance control part provided in the peripheral region and configured to control intensity of light transmitted through the template in thickness direction, the template having a planar shape axisymmetric with respect to a line passing through center of the template, and the region provided with the second protrusion and the first transmittance control part being provided at positions axisymmetric to each other with respect to the line passing through the center of the template.