| 摘要 |
PROBLEM TO BE SOLVED: To provide a photosensor with a simple structure and an improved signal-to-noise ratio.SOLUTION: Wiring is formed on a holding surface of a holding substrate which holds a beam while in contact with the wiring. A through electrode is embedded in the beam and penetrates from a top face to an undersurface of the beam. A photoelectric conversion part is fixed on the top face of the beam and fixed to a thin part of the beam. The photoelectric conversion part includes a photothermal conversion body and a pyroelectric body which are thermally coupled to each other. An upper electrode is in direct contact with the photothermal conversion body. The upper electrode and a bottom electrode face each other with a thermosensitive body interposed therebetween, and are in contact with and electrically conducted with the wiring via the through electrode. A periodic structure is formed in the photothermal conversion body, in which unit structures are periodically arrayed. A part of the unit structure only includes a substance with negative dielectric constant. The electrical property of the pyroelectric body changes by heat. The change in electrical property is transmitted via the through electrode and the wiring to the outside, and is used to determine whether light received by the periodic structure is present or to measure an amount of light received by the periodic structure. |
