OPTICAL MEMBER WITH ANTIREFLECTION FILM, AND METHOD OF MANUFACTURING THE SAME

摘要

An antireflection film including a transparent thin film layer, and a transparent fine uneven layer whose main component is an alumina hydrate, which layers are formed in this order on a surface of a transparent substrate, is provided. The transparent thin film layer has an intermediate refractive index between the refractive index of the transparent substrate and the refractive index of the fine uneven layer, and the transparent thin film layer includes at least a nitride layer or an oxynitride layer.

主权项

1. An optical member with an antireflection film,
the antireflection film comprising a transparent thin film layer, and a transparent fine uneven layer whose main component is an alumina hydrate, which layers are formed in this order on a surface of a transparent substrate, wherein the transparent thin film layer has an intermediate refractive index between a refractive index of the transparent substrate and a refractive index of the fine uneven layer, and the transparent thin film layer comprises at least a nitride layer or an oxynitride layer.