GAS LASER SYSTEM RE-ACTIVATABLE WITHOUT ANY DAMAGE WITHIN SHORT TIME DURING RECOVERY OF POWER SUPPLY

摘要

A gas laser system including a laser oscillator including a device which needs a predetermined standby time until normally starting an operation after stopping an operation due to reduction of a power supplied from a power source unit, a controller, a power reduction detection unit, and a nonvolatile storage unit storing time data of a first time point when the reduction of the supplied power is detected by the power reduction detection unit. The controller calculates an operation stop time of the device, based on time from the first time point to a second point time when a next system activation command is output, and inhibits operation resumption of the device when the operation stop time is within a predetermined standby time.

主权项

1. A gas laser system comprising:
a power source unit; a laser oscillator operated by power supplied from the power source unit and including a device, a predetermined standby time being needed until the device normally starts an operation after the device stops the operation due to reduction of the power supplied from the power source unit; a controller configured to control the laser oscillator; a power reduction detection unit configured to detect the reduction of the power supplied from the power source unit, in which the power is lowered than a power value operable normally the laser oscillator; and a nonvolatile storage unit configured to store time data of a first time point when the reduction of the supplied power is detected by the power reduction detection unit, wherein the controller calculates an operation stop time of the device, based on time from the first time point acquired from the time data stored in the nonvolatile storage unit to a second point time when a next system activation command is output, permits operation resumption of the device when the operation stop time exceeds the predetermined standby time, and inhibits the operation resumption of the device when the operation stop time is within the predetermined standby time.