OBSERVATION APPARATUS, DEVICE, DEVICE PRODUCTION METHOD, PARTICLE DIAMETER MEASUREMENT METHOD, RESISTANCE PROPERTY OBSERVATION METHOD, CHEMICAL REACTION METHOD, PARTICLE PRESERVATION METHOD, AND AUTOMATED OBSERVATION APPARATUS
摘要
An observation apparatus (100) is provided with an observation optical system (101) with which it is possible to obtain an image of a measured object present in a space belonging to a device (1). The space belonging to the device (1) is wider at one end than at the other, and when the device (1) is illuminated with light, interference arises in the space. The observation optical system (101) illuminates the space belonging to the device (1) with a plurality of lights having different wavelengths, generating a plurality of interference fringes in the space. The observation optical system (101) then acquires an image of the plurality of interference fringes.