FILM THICKNESS MEASUREMENT DEVICE

摘要

A measurement head (23) irradiates a film (12) of a product substrate (10) with primary X-rays to detect fluorescent X-rays generated from the film (12). Analysis means (33) obtains thickness of the film (12) from intensity of the fluorescent X-rays detected by the measurement head (23).

主权项

1. A film thickness measurement device, comprising:
a base (1); a substrate stage (2) which is provided on the base (1) and on which a product substrate (10) having a film is placed; a gantry (4) that extends in a first direction (A) with respect to the substrate stage (2) and is installed in the base (1) so as to be movable in a second direction (B) with respect to the substrate stage (2); a slider (5) that is installed in the gantry (4) so as to be movable in the first direction (A); a measurement head (23) that is fixed to the slider (5) and irradiates a film (12) of the product substrate (10) placed on the substrate stage (2) with primary X-rays to detect fluorescent X-rays generated from the film (12); and analysis means (33) that obtains thickness of the film (12) from intensity of the fluorescent X-rays detected by the measurement head (23).