<p>According to one embodiment of the present invention, a multifunctional MEMS sensor comprises: a first sensing unit having a mass and having a flexible beam coupled to the mass and having a support unit where the flexible beam is connected and supporting the mass to be floated; and a deformation detection unit coupled to a buffer beam unit coupled to the support unit to face the mass.</p>
申请公布号
KR20150090629(A)
申请公布日期
2015.08.06
申请号
KR20140011519
申请日期
2014.01.29
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
KIM, JONG WOON;LIM, CHANG HYUN;LEE, JUNE KYOO;HAN, SEUNG HUN;KIM, TAE YOON;SONG, JONG HYEONG