| 摘要 |
The sensor apparatus according to one aspect of the present invention is provided with: an element substrate; an element electrode positioned on the upper surface of the element substrate; an insulating member covering at least a portion of the element electrode; and a detector having an immobilizing film positioned on the upper surface of the element substrate or on the upper surface of the insulating member, and used for detecting a detection target included in a test specimen. The surface roughness of the immobilizing film is lower than the surface roughness of the element electrode. In the sensor apparatus according to another aspect of the present invention, the amount of oxygen in the surface layer portion of the immobilizing film is less than the amount of oxygen in the surface layer portion of the element electrode. |
