| 摘要 |
A material processing system that prevents transmission of infrared radiation from its pyrolysis tube to one or more adjacent elements, such as a vaporization chamber or a deposition chamber, is disclosed. Such a material processing system may include at least one conduit with a non-linear element. The non- linear element of such a conduit may preclude the presence of a line-of-sight through the length of the conduit. The non-linear element may also have a shape that enables gas or vapor to flow therethrough with little or no turbulence, which, in embodiments where part or all of the material processing system lacks valves, enables the gas or vapor to flow freely through the material processing system, or at least through the valveless portion thereof. |
